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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
新式高深寬比懸浮MEMS結構之製程
Details
新式高深寬比懸浮MEMS結構之製程
Journal
in Proc. of 第七屆奈米工程暨微系統技術研討會
Date Issued
2004
Author(s)
W.-C. Kuo
Y- J. Yang
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587763
Description
Hsinchu, Taiwan
Type
conference paper