Effect on the electro-optical properties of transparent conducting aluminum doped zinc oxide thin films using low temperature ultraviolet laser annealing
Journal
Journal of Materials Science: Materials in Electronics
Journal Volume
28
Journal Issue
20
Pages
15647-15656
Date Issued
2017
Author(s)
Abstract
This study examined the laser annealing process of aluminum-doped zinc oxide (AZO) films utilizing an ultraviolet laser source (355 nm) as well as a glavo scanner with different parameters, including laser fluence and annealing speed, in an air atmosphere at room temperature. The films’ characteristics were analyzed using an Ultraviolet–Visible–Near-infrared (UV–Vis–NIR) spectrophotometer, a four-point probe, and a Hall effect measurement system. The experimental results indicated that varying the laser fluence and annealing speed affected the optical and electrical properties of the AZO films. After the laser annealing process, there was a slight change in the visible region with approximately 84.7% of transmittance spectra. The maximum resistivity values of the annealed AZO films decreased from 1.15 to 1.17 × 10−2 Ω cm, approximately 99% higher than the initial value.
Type
journal article