Inverse determination of coupling of modes parameters of surface acoustic wave resonators
Journal
Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
Journal Volume
41
Journal Issue
11A
Pages
6610-6615
Date Issued
2002
Author(s)
Wu, T. T.
Wang, S. M.
Chen, Y. Y.
Wu, T. Y.
Chang, P. Z.
Huang, L. S.
Wang, C. L.
Wu, C. W.
Abstract
Extraction of coupling of modes (COM) parameters from the manufacturing process of a surface acoustic wave device (SAW) is important in practice. In this study, we employed an inverse algorithm to recover the COM parameters from the measured admittance of a one-port SAW resonator. For completeness, the COM equations, the P-matrix representation and the related COM parameters have been summarized. The admittance of a one-port resonator was derived based on the P-matrix representation. One-port and two-port SAW resonator filters were fabricated and the related responses were measured. The simplex method was then used to determine the COM parameters reversely. The recovered COM parameters of the one-port SAW resonator have been demonsutrated to be applicable to simulate not only the frequency response of the one-port SAW resonator but also that of the two-port one.
Subjects
Coupling of modes; IDT; Inverse; Resonator filter; Surface acoustic wave
Other Subjects
Acoustic surface wave filters; Acoustic transducers; Algorithms; Computer simulation; Frequency response; Matrix algebra; Parameter estimation; Inverse algorithms; Acoustic resonators
Type
journal article