Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry
Journal
IEEE Transactions on Industrial Electronics
Journal Volume
57
Journal Issue
3
Pages
1120-1126
Date Issued
2010
Author(s)
Abstract
In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.
Type
journal article