Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry

Journal

IEEE Transactions on Industrial Electronics

Journal Volume

57

Journal Issue

3

Pages

1120-1126

Date Issued

2010

Author(s)

Chen, L.-C.

Nguyen, X.-L.

Huang, H.-S.

Chen, J.-L.

LIANG-CHIA CHEN

DOI

10.1109/TIE.2009.2036645

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447871

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-76849099137&doi=10.1109%2fTIE.2009.2036645&partnerID=40&md5=d99def67c517f27712c9ff4b73209399

Type

journal article