Interface reactions of high-k Y2O3 gate oxides with Si

Journal

Applied Physics Letters

Journal Volume

79

Journal Issue

15

Pages

2447-2449

Date Issued

2001

Author(s)

Busch, BW

Kwo, J

Mannaerts, JP

Sapjeta, BJ

Schulte, WH

Garfunkel, E

Gustafsson, T

URI

http://scholars.lib.ntu.edu.tw/handle/123456789/293165

Type

journal article