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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A measurement system for the geometric accuracy of X-Y stages in 6 d-o-f
Details
A measurement system for the geometric accuracy of X-Y stages in 6 d-o-f
Resource
Keynote paper, Proc. of the Int. ISIST'99, China(1999,08)
Journal
Keynote paper
Pages
-
Date Issued
1999-08
Date
1999-08
Author(s)
Fan, K. C.
URI
http://ntur.lib.ntu.edu.tw//handle/246246/156426
Type
conference paper