Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide

Resource

MICROELECTRONIC ENGINEERING, 87(12), 2620-2624

Journal

Microelectronic Engineering

Pages

2620-2624

Date Issued

2010

Date

2010

Author(s)

Wu, Jing-Tang

Chu, Ying-Ta

Li, Chen-Chung

DOI

URI

Type

journal article

File(s)

Name

320.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

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