Structural differences between deuterated and hydrogenated silicon nitride/oxynitride

Journal

Journal of Applied Physics

Journal Volume

89

Journal Issue

10

Pages

5355-5361

Date Issued

2001

Author(s)

Shih, A.

Yeh, S.-H.

Lee, S.-C.

Yang, T.R.

DOI

10.1063/1.1364645

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498755

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035873288&doi=10.1063%2f1.1364645&partnerID=40&md5=aead652423581b89e43a272cb2069901

Type

journal article