Identification of infrared absorption peaks of amorphous silicon-carbon alloy by thermal annealing

Journal

Applied Physics Letters

Journal Volume

51

Journal Issue

25

Pages

2112-2114

Date Issued

1987

Author(s)

Lin, W.-L.

Tsai, H.-K.

Lee, S.-C.

Sah, W.-J.

Tzeng, W.-J.

DOI

10.1063/1.98963

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498819

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0041164874&doi=10.1063%2f1.98963&partnerID=40&md5=667d79646b2d38d9b4c601f344d8665b

Type

journal article