System Integration and Software Development of Micro Coordinate Measuring Machine
Date Issued
2011
Date
2011
Author(s)
Ye, Jyun-Kuan
Abstract
This research proceeds the system integration of micro coordinate measuring machine (Micro-CMM). All parts of Micro-CMM which were developed themselves are integrated together. And a set of CMM software is developed to be used. Finally, the measurement of Micro-CMM is proceeded. Achieving the establishment of Micro-CMM is set as the target in this research.
Each part of Micro-CMM would be introduced in the paper, including Co-planar stage, Z axis, probe and all the sensors. Sensors are DVD pick-up heads for machine origins and backlash compensation, and laser diffraction grating interferometer (LDGI) as position feedback.
In this research, ultrasonic motor is controlled by self-tuning neuro-PID controller to drive three axes with large and small stroke, and even any contour control. Laser interferometer is used as calibration of Micro-CMM, and quadrant photo detector is used to align the optical axes. Finally, Mapping-Error is established to promote the precision of Micro-CMM. And the functions for measurement of basic elements, coordinate transformation and trigger judgment of the scanning trigger probe are developed with the Borland C++ Builder 6 software. After all the component prepared, proceed the actual measurement of Micro-CMM.
Subjects
Micro-CMM
Co-planar stage
Machine origin
LDGI
Contour Control
Type
thesis
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