Establishment of a Near-Field Photolithography Processing Experiment Prediction Model and Parameter Optimization Model

Resource

JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 8(7), 1183-1192

Journal

Journal of Computational and Theoretical Nanoscience

Pages

1183-1192

Date Issued

2011

Date

2011

Author(s)

Lin, Zone-Ching

Yang, Ching-Been

DOI

URI

Type

journal article

File(s)

Name

index.html

Size

23.5 KB

Format

HTML

Checksum

(MD5):829f9666dba2efc2712f69458e945ddf