Application of vacuum-assisted filling system with ultraviolet-light- emitting diode array to fabrication of waveguide microstructures

Journal

Japanese Journal of Applied Physics

Journal Volume

48

Journal Issue

11

Pages

-

Date Issued

2009

Author(s)

Weng, Y.J.

Weng, Y.C.

Fang, H.S.

Yang, S.Y.

DOI

10.1143/JJAP.48.116502

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448167

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-73849092009&doi=10.1143%2fJJAP.48.116502&partnerID=40&md5=ba7b1e98427d792341b4f1b5931db13c

Type

journal article