The Study of LIGA Like Fabrication Process for Refractive/Diffractive Microlens
Date Issued
2007
Date
2007
Author(s)
Yang, Jauh-Jung
DOI
zh-TW
Abstract
Polymer micro-optics has been widely used for various applications such as imaging systems, digital display systems, digital optical processors, and optical interconnection, etc. In micro-optics fabrication process, the precision mold is foundation to achieve ideal performance of micro-optics. Refractive and diffractive microlens are mosytly used in micro-optics system. To improved fabrication quality of refractive and diffractive microlens, modified mold fabrication processes are proposed. The study was divided into two parts:
The first part is to develop an asymmetrical hexagonal microlens (HML) used for light emitting purpose. To obtain ideal spherical lens profile and near 100% filling factor, accurate optical density (OD) was employed in gray-scale lithography process. By applying precision micro-replication process, a high quality HML array was duplicated on flexible polyethylene terphthalate (PET) film. The fabrication quality was inspected and compared with the designed specifications. A hexagonal microlens array with long aspect ratio of 3.3:1 designed for beam shaping was fabricated by applying gray-scale lithography micro-replication process. The gray-scale lithography process was employed in this study to obtain unity curvature and to maximize filling factor of the lens array. Precision micro-replication process was applied to duplicate HML on a flexible polyethylene terphthalate (PET) substrate by UV-forming process. The geometry character of obtained HML was inspected and the shape errors of HML are below 5% which is very close to the designed specification. The optical performance was also investigated. It was found that the incident beam of white LED was diversified differently at short and long axis. The diversified view angles (FWHM) at long and at short axis directions through HML are 29.2
Subjects
折射微透鏡
繞射微透鏡
類LIGA製程
微成形
Diffraction Microlens
Refractive Microlens
LIGA-Like Fabrication
Micro-Replication
Type
thesis
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