Extraction of heat transfer macromodels for MEMS devices

Resource

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Journal

12th International Conference on Solid-State Sensors, Actuators and Microsystems

Pages

-

Date Issued

2003-06

Date

2003-06

Author(s)

Yu, Che-Chia

DOI

N/A

URI

Type

journal article

File(s)

Name

01217149.pdf

Size

289.73 KB

Format

Adobe PDF

Checksum

(MD5):361b3fdef6a1b83772616a42f0de7998