Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform

Journal

Microelectronic Engineering

Journal Volume

85

Journal Issue

3

Pages

603-609

Date Issued

2008

Author(s)

Yang, S.-Y.

Cheng, F.-S.

Xu, S.-W.

Huang, P.-H.

Huang, T.-C.

DOI

10.1016/j.mee.2007.11.004

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448184

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-39149118379&doi=10.1016%2fj.mee.2007.11.004&partnerID=40&md5=7e80decb4a6993e70e59556e2e67f832

Type

journal article