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College of Engineering / 工學院
Industrial Engineering / 工業工程學研究所
An effective SPC approach to monitoring semiconductor quality data with multiple variation sources
Details
An effective SPC approach to monitoring semiconductor quality data with multiple variation sources
Resource
Semiconductor Manufacturing Technology Workshop, 2000
Journal
Semiconductor Manufacturing Technology Workshop
Pages
-
Date Issued
2000-06
Date
2000-06
Author(s)
Chen, Argon
Guo, Ruey-Shan
ARGON CHEN
RUEY-SHAN GUO
DOI
10.1109/SMTW.2000.883106
DOI
N/A
URI
http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551443
SDGs
[SDGs]SDG9
Type
journal article
File(s)
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Name
00883106.pdf
Size
252.86 KB
Format
Adobe PDF
Checksum
(MD5):c4641b1af1ae2dbdec22bf8f0e1f9ddb
