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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
High resolution electron beam direct write on ZEP520 at 5 KeV
Details
High resolution electron beam direct write on ZEP520 at 5 KeV
Journal
International Microprocesses and Nanotechnology Conference 2009
Pages
178-179
Date Issued
2009-11
Author(s)
Fu-Min Wang
S. Ono
Hsing-Hong Su
Kuen-Yu Tsai
Chieh-Hsiung Kuan
KUEN-YU TSAI
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/352131
Type
conference paper