600 meV Effective Work Function Tuning by Sputtered WNxFilms

Journal

2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020

Pages

106-107

Date Issued

2020

Author(s)

Tsai, C.-E.

Huang, C.-H.

Chen, Y.-R.

Tu, C.-T.

Huang, Y.-S.

Liu, C.W.

DOI

URI

Type

conference paper