Effects of oxygen addition and treating distance on surface cleaning of ITO glass by a non-equilibrium nitrogen atmospheric-pressure plasma jet
Journal
Plasma Chemistry and Plasma Processing
Journal Volume
30
Journal Issue
5
Pages
553-563
Date Issued
2010
Author(s)
Chiang M.-H.
Lin I.-M.
Lu C.-C.
Huang H.-Y.
Kuo C.-L.
Wu J.-S.
Chen S.-H.
Abstract
Effects of oxygen addition and treating distance on cleaning organic contaminants on stationary and non-stationary (1-9 cm/s) ITO glass surfaces by a parallel-plate nitrogen-based dielectric barrier discharge (DBD) are investigated experimentally; the DBD is driven by a 60 kHz bipolar quasi-pulsed power source. The results show that two regimes of favorable operating condition for improving the hydrophilic property of the surface (reducing the contact angle from 84° to 25-30°) are found. The measured spatial distribution of NO-γ UV emission, O 3concentration and OES spectra are shown to strongly correlate with the measured hydrophilic property. At the near jet downstream locations (z < 10 mm), the metastable N 2(A 3σ + u) and photo-induced dissociation of ozone play dominant roles in cleaning the ITO glass surface; while at the far jet downstream locations (z > 10 mm), where the ratio of oxygen to nitrogen is lower, only the long-lived metastable N 2(A 3σ + u) plays a major role in cleaning the ITO glass surface. ©Springer Science+Business Media, LLC 2010.
Type
journal article