Effects of oxygen addition and treating distance on surface cleaning of ITO glass by a non-equilibrium nitrogen atmospheric-pressure plasma jet
Journal
Plasma Chemistry and Plasma Processing
Journal Volume
30
Journal Issue
5
Pages
553-563
Date Issued
2010
Author(s)
Chiang M.-H.
Lin I.-M.
Lu C.-C.
Huang H.-Y.
Kuo C.-L.
Wu J.-S.
Chen S.-H.
Type
journal article