MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode

Resource

Proc. SPIE 6169, Smart Structures and Materials 2006: Damping and Isolation, 61690B

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6169

Date Issued

2006

Author(s)

Lee, B.-S.

He, J.-J.

Wu, W.-J.

Shih, W.-P.

Lee, Bor-Shun

He, Jyun-Jhang

Wu, Wen-Jong

Shih, Wen-Pin

DOI

URI

Type

conference paper

File(s)

Name

74.pdf

Size

23.47 KB

Format

Adobe PDF

Checksum

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