The fringe capacitance formula of microstructures

Journal

Journal of Micromechanics and Microengineering

Journal Volume

22

Journal Issue

2

Date Issued

2012

Author(s)

Chuang, W.-C.

Wang, C.-W.

Chu, W.-C.

Chang, P.-Z.

Hu, Y.-C.

DOI

10.1088/0960-1317/22/2/025015

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486824

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863269948&doi=10.1088%2f0960-1317%2f22%2f2%2f025015&partnerID=40&md5=e303db3fbff64679c145174b5e8287d9

Type

journal article