Novel CMOS MEMS Double Parallel Plate Capacitive Tactile Sensors For Blood Flow Monitoring
Journal
AVS 58th International Symposium & Exhibition
Date Issued
2011-11
Author(s)
C. -J. Hsieh
J. -C. Liou
C. -T. Sun
Y. -C. Lin
WEI-CHENG TIAN
Type
conference paper