Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6924

Date Issued

2008

Author(s)

Su, Y.-S.

Ng, P.C.W.

Tsai, K.-Y.

DOI

10.1117/12.772397

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/501108

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-45449107191&doi=10.1117%2f12.772397&partnerID=40&md5=0f8e069efb0a7b4284dd58010a9e694c

Type

conference paper