Air Damping on Perforated Microstructures
Date Issued
2004
Date
2004
Author(s)
Jang, Jin-Hsiang
DOI
zh-TW
Abstract
This paper investigates effects of squeeze film for microstructures that oscillates in the normal direction. The governing equation uses the Navior-Stokes equation and makes several assumptions. We not only consider the thin plate of different geometric shape but also consider the thin plate with different kinds of boundary condition. Furthermore, utilizing the analytic results of the circular plate to simulate the perforated microstructures.
Finally, we use the analytic results to apply on a capacitive micro-accelerometer and discuss variant performance while different numbers and sizes of perforations.
Subjects
加速度計
開孔效應
微結構
空氣阻尼
air damping
squeeze flim
accelerometer
microstructures
Type
thesis
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