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College of Science / 理學院
Applied Physics / 應用物理研究所
Interface analysis of dry etched and molecular beam epitaxial regrown AlGaAs
Details
Interface analysis of dry etched and molecular beam epitaxial regrown AlGaAs
Journal
Journal of Vacuum Science & Technology B
Journal Volume
12
Journal Issue
2
Pages
1038-1042
Date Issued
1994
Author(s)
Grober, LH
MINGHWEI HONG
Mannaerts, JP
Freund, RS
Luftman, HS
Chu, SNG
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/308668
Type
journal article