Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6933

Date Issued

2008

Author(s)

Lee, B.-S.

Lin, S.-C.

Wu, W.-J.

DOI

10.1117/12.776406

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/452044

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-43649097556&doi=10.1117%2f12.776406&partnerID=40&md5=a94d0a561861c861870224131dadfbfb

SDGs

[SDGs]SDG7

Type

conference paper