Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory

Resource

Thin Solid Films, 517(24), 6850-6852

Journal

Thin Solid Films

Journal Volume

517

Journal Issue

24

Pages

6850-6852

Date Issued

2009

Date

2009

Author(s)

Ho, Ching-Yuan

He, Jr-Hau

Chang, Yuan-Pul

Lien, Chenhsin

URI

Type

journal article

File(s)

Name

12.pdf

Size

23.23 KB

Format

Adobe PDF

Checksum

(MD5):f0ae27bd3fd4fbe202ee6db71430e8c8