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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Development of SiN
x
Films for Attenuated Phase Shifting Masks
Details
Development of SiN
x
Films for Attenuated Phase Shifting Masks
Journal
Optics and Photonics Taiwan '01
Pages
677-680
Date Issued
1997-01
Author(s)
H. L. Chen
L. A. Wang
L. S. Yeh
C. W. Hsu
LON A. WANG
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/333902
Type
conference paper