On-wafer electrooptic probing using rotational deformation modulation
Journal
IEEE Photonics Technology Letters
Journal Volume
12
Journal Issue
9
Pages
1228-1230
Date Issued
2000
Author(s)
Abstract
On-wafer electrooptic probing of two-dimensional electric-field vector (E-vector) is demonstrated by using one laser beam and one electrooptic prober. This technique utilizes both compressed-stretched deformation and rotational deformation on the index ellipsoid of the electrooptic crystal. Both experiment and simulation were performed to map the E-vector on a circuit board, and the measurement error is within 2.2%.
Type
journal article