雙極式靜電吸盤測試環境及吸附力之探討
Date Issued
2003-05-31
Date
2003-05-31
Author(s)
楊照彥
DOI
912622E002012CC3
Abstract
This report describes the main objectives
accomplished in this project,we purpose to
build and assembly a test enviroment for the
study of bipolar electrostatic chucks. The
numerical tool STAR-CD code was used to
simulate the complete details of the heat transfer
problem.
Subjects
electrostatic chuck
heat
transfer
transfer
Bipolar ESC
Publisher
臺北市:國立臺灣大學應用力學研究所
Type
report
File(s)![Thumbnail Image]()
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Name
912622E002012CC3.pdf
Size
123.99 KB
Format
Adobe PDF
Checksum
(MD5):11951d43c66786cf4f59c633771184be
