Molecular beam epitaxy grown Ga2 O3 (Gd2 O3) high 庥 dielectrics for germanium passivation-x-ray photoelectron spectroscopy and electrical characteristics

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

26

Journal Issue

3

Pages

1128-1131

Date Issued

2008

Author(s)

Lee, C.H.

Lin, T.D.

Tung, L.T.

Huang, M.L.

Kwo, J.

DOI

URI

URL

Type

journal article