Molecular beam epitaxy grown Ga2 O3 (Gd2 O3) high 庥 dielectrics for germanium passivation-x-ray photoelectron spectroscopy and electrical characteristics
Journal
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Volume
26
Journal Issue
3
Pages
1128-1131
Date Issued
2008
Author(s)
Abstract
Molecular beam epitaxy deposited Ga2O3(Gd2O3) on Ge, without a commonly employed interfacial layer of GeON, has demonstrated excellent electrical properties, such as a high κ value of 14.5, a low electrical leakage current density, and well behaved C-V characteristics even being subjected to 500°C annealing in N2 ambient for 5min. In situ angle-resolved x-ray photoelectron spectroscopy (XPS) studies have revealed an abrupt Ga2O3(Gd2O3)∕Ge interface without forming any interfacial layer. Further XPS studies explained the outstanding thermodynamic stability of the Ga2O3(Gd2O3)∕Ge heterostructure.
Type
journal article