Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acid

Journal

Environmental Science and Pollution Research

Journal Volume

https://www.scopus.com/inward/record.url?eid=2-s2.0-85088829505&partnerID=40&md5=79f7c098e2a010dc875e68d8fbaa8865

Journal Issue

2-s2.0-85088829505

Date Issued

2020

Author(s)

Lin, M.-F.

Wu, J.-L.

Chang, K.-L.

Lee, W.-J.

Chang, C.-P.

Lin, Y.-C.

Chen, P.-H.

DOI

URI

Publisher

32729035

Type

journal article