Development and Applications of Multi-Degree-of-Freedom Angular Error Measurement System
Date Issued
2010
Date
2010
Author(s)
Lin, Sheng-Yi
Abstract
Since variant reasons, linear moving stage has six degree-of-freedom errors during moving process. Especially the angular error influences the positioning precision significantly due to the Abbé principle. Therefore to improve the precision of the stage, the most important job is to measure its angular error information.
In general, commercial high precision angular sensors are expensive so that cannot be installed on machine to do long-term monitoring. The purpose of this article is to develop small volume, low cost, and high-precision sensors based on commercialized DVD pick-up head, quadrant detector and self-made signal process circuits.
In the application of DVD pick-up head, DVD autocollimator, 1-D and 2-D optoelectronic level are developed. Moreover, by employing two quadrant detector, optical system and laser source, a sensor which can measure 2-D straightness and roll angular error is fabricated. Finally, the DVD autocollimator and the roll sensor are integrated into one 5-DOFs measurement system, which can measure 2-D straightness , pitch, yaw and roll angular error simultaneously.
Subjects
DVD pick-up head
quadrant detector
autocollimator
level instrument
Type
thesis
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