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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Studies of boron diffusivities on (001) and (110) substrate orientation in Si and Ge along vertical/out-of plane and lateral/in-plane directions study
Details
Studies of boron diffusivities on (001) and (110) substrate orientation in Si and Ge along vertical/out-of plane and lateral/in-plane directions study
Journal
Thin Solid Films
Date Issued
2013
Author(s)
M. H.Liao
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/404548
Type
journal article
