Composition control of r.f.-sputtered Ni<inf>2</inf>MnGa thin films using optical emission spectroscopy

Journal

Materials Transactions

Journal Volume

43

Journal Issue

5

Pages

871-875

Date Issued

2002

Author(s)

Wu, S.-K.

Tseng, K.-H.

DOI

10.2320/matertrans.43.871

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448313

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036577895&doi=10.2320%2fmatertrans.43.871&partnerID=40&md5=e80e076ecee2307959e9e5f6f675c237

Type

journal article