Multivariable control of multi-zone chemical mechanical polishing

Resource

Semiconductor Manufacturing Technology Workshop Proceedings, 2004

Journal

Semiconductor Manufacturing Technology Workshop Proceedings

Pages

-

Date Issued

2004

Date

2004

Author(s)

Shiu, Sheng-Jyh

Yu, Cheng-Ching

Shen, Shih-Haur

Su, An-Jhih

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01393737.pdf

Size

256.54 KB

Format

Adobe PDF

Checksum

(MD5):e06f855e7c0e0e01e5068956249dcce1