Measuring Piezoelectric Material Constants by Using Hybrid Method and Investigations on Dynamic Characteristics and Temperature Effect
Date Issued
2007
Date
2007
Author(s)
Chien, Wei-Sheng
DOI
zh-TW
Abstract
Piezoelectric crystals and ceramics are widely applied in numerous applications including transducers, actuators, sensors, SAW device etc. The properties and efficiency of these piezoelectric materials are descried in terms of their basic parameters such as elastic, piezoelectric, dielectric constants and electromechanical coupling coefficients. In the other hand, brittle piezoceramic materials are easy to produce fracture in manufacturing processes and different loading conditions to influence their usefulness and stability. Thus, it is very important to study fabrications and characteristics of piezoelectric materials. Development of a complete method of measuring piezoelectric material constants and numerical simulation of finite element method reach to predict the dynamic behaviors of piezoelectric devices. At the same time, to research dynamic characteristics of piezoelectric material and their temperature rising phenomenon at resonant frequencies.
In this dissertation, resonant method, ultrasonic method and combined ultrasonic-resonant method are used to measure a complete set of elastic, piezoelectric and dielectric constant for PZT with symmetry point group of 6mm and combination of FEM numerical calculation to simulate resonant frequencies and mode shape of piezoelectric plate in free boundary condition. In order to verify accuracy of FEM, we further applied three experimental techniques, AF-ESPI, LDV and impedance analyzer to obtain the vibration characteristics of piezoelectric plates and the experimental results are compared to FEM simulation. Finally, the relationship between temperature and vibration characteristics of piezoelectric plates is established base on experimental measurement of infrared thermography.
Subjects
共振法
超音波量測法
超音波與共振法
振幅變動電子斑點干涉術
雷射都卜勒振動儀
阻抗分析儀
紅外線熱像儀
壓電平板製程
resonance method
ultrasonic method
combined ultrasonic-resonant method
AF-ESPI
LDV
impedance analyzer
infrared thermography
fabrication of piezoelectric plate
Type
thesis
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