Stable p-type ZnO films grown by atomic layer deposition on GaAs substrates and treated by post-deposition rapid thermal annealing

Resource

Thin Solid Films, 519(16), 5558-5561

Journal

Thin Solid Films

Pages

5558-5561

Date Issued

2011

Date

2011

Author(s)

Cheng, Yung-Chen

Kuo, Ying-Shen

Li, Yun-Hsiu

Shyue, Jing-Jong

DOI

URI

SDGs

[SDGs]SDG6

Type

journal article

File(s)

Name

181.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):f02b7ad4ac2459590fae53c793e5e8c3