Electrode Patterning on Ionic Polymer Metal Composite for Making Smooth Surface on Tunable Mirror
Date Issued
2012
Date
2012
Author(s)
Cheng, Wei
Abstract
Deformable mirror is a very important reflective component in optical system, which can vary the focal length while the surface deform. Nowadays several type of material were used as deformable mirror, such as liquid lens and MEMS deformable mirror. MEMS deformable mirror have been developed in our group and shows the potential.
However, the problem of high actuation voltage is not easy to solve.
In this thesis, we proposed using low voltage applied material, which is called Ionic-Polymer Metal Composite (IPMC) with the advantage of low applied voltage but high actuation performance. Arbitrary-shaped electrode IPMC was successfully fabricated by simply covering a shadow mask during electroless plating. Maximum central displacement of ellipsoid-shaped electrode IPMC can be achieved up to 350 μm under 2.5 volts applied. We believe this technique can be used in optical system as a deformable mirror in the future.
Subjects
IPMC
Deformable Mirror
Arbitrary-Shaped Electrode
Type
thesis
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