Fabrication of 3 dimensional graphene gas sensor with high sensitivity
Date Issued
2014
Date
2014
Author(s)
Zhuang, You-Ming
Abstract
We report a highly sensitive NO2 gas sensor 3 dimensional graphene films synthe- sized by a chemical vapor deposition on a polyimide substrate. We demonstrate parts- per-million level detection of NO2 in N2 at room-temperature. The maximum response of our 3D graphene device at 10 ppm NO2 is 13.4% which is about 1.4 times higher than the 2D graphene gas sensor. It also exhibited a resistance change of ~6.3% when it was exposed to 5ppm NO2 gas at room-temperature for 20 min. The results are discussed in light of recent literature on carbon nanotube (CNT) and graphene sensors. The advantages of this sensor are high sensitivity, easy fabrication, and low cost.
Subjects
石墨烯
氣體感測器
二氧化氮
三維結構
化學氣相沉積法
Type
thesis
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