Time dependent preferential sputtering in the HfO2 layer on Si(100)

Journal

Thin Solid Films

Journal Volume

516

Journal Issue

6

Pages

948-952

Date Issued

2008

Author(s)

Chang, S.J.

Lee, W.C.

Hwang, J.

Kwo, J.

DOI

10.1016/j.tsf.2007.06.007

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443429

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-37549038602&doi=10.1016%2fj.tsf.2007.06.007&partnerID=40&md5=862a1716a6ef41b0fa082bf6c022e726

Type

journal article