On-Wafer Characterization of Thermomechanical Properties of Isotropic Thin Films Deposited on Anisotropic Substrates

Resource

Japanese Journal of Applied Physics 47 (7): 5623-5629

Journal

Japanese Journal of Applied Physics

Journal Volume

47

Journal Issue

7

Pages

5623-5629

Date Issued

2008

Date

2008

Author(s)

Wu, Liang-Chieh

Chou, Yuan-Fang

URI

Type

journal article

File(s)

Name

07.pdf

Size

326.47 KB

Format

Adobe PDF

Checksum

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