A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection
Resource
MICROELECTRONIC ENGINEERING, 87(10), 1951-1954
Journal
Microelectronic Engineering
Pages
1951-1954
Date Issued
2010
Date
2010
Author(s)
Abstract
This paper presents a cost-effective method to fabricate tapered sub-wavelength structures (SWSs) on the polycarbonate (PC) film using gas-assisted hot embossing with anodic aluminum oxide (AAO) template. The AAO template with array of high-aspect-ratio submicron holes was fabricated using a two-step anodization process. The soften polymer is then pressurized by gas to fill deep into the nano-holes, tapered SWSs could be generated by directly separating the PC film from AAO template during the demolding process. The heights were up to about 260 nm. The fabricated PC film reduces the reflectivity from 8.9% in a bare film to 2% with tapered SWSs at the wavelength of 550 nm. The AAO template can be used repeatedly. © 2009 Elsevier B.V. All rights reserved.
Type
journal article
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