A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection

Resource

MICROELECTRONIC ENGINEERING, 87(10), 1951-1954

Journal

Microelectronic Engineering

Pages

1951-1954

Date Issued

2010

Date

2010

Author(s)

Wu, Jing-Tang

Deng, Wei-Chih

Chang, Wei-Yi

DOI

URI

Type

journal article

File(s)

Name

345.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):abf5f0fc9177bbd8bcd944a6daaaa8da