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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
An Adaptive Process Controller for Semiconductor Manufacturing
Details
An Adaptive Process Controller for Semiconductor Manufacturing
Journal
Automatic Control Conference
Date Issued
1997-03
Author(s)
RUEY-SHAN GUO
L. Huang
S. Wang
J. Chen
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/334394
Type
conference paper