A novel technique for fabrication of herringbone grooves in dynamic thrust bearing combining UV-LIGA with Electro-Discharge-Machining
Resource
Microsystem Technologies,12,529-536.
Journal
Microsystem Technologies
Journal Issue
12
Pages
529-536
Date Issued
2006-05
Date
2006-05
Author(s)
Kuo, J. S.
Chiu, K. T.
Hsu, S. W.
Chen, P. H.
Liao, Y. S.
Yang, C. R
Type
journal article