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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Method for etching nitride
Details
Method for etching nitride
Date Issued
1999-01
Author(s)
LUNG-HAN PENG
Chih-Wei
Jin-Kuo Ho
Chih-Yuan Chen
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/352352
Type
patent