Occurrence of polytype transformation during nitrogen doping of SiC bulk wafer
Journal
Materials Science Forum
Journal Volume
600-603
Pages
39-42
Date Issued
2009
Author(s)
CHIEH-HSIUNG KUAN
Chen, J.
Lien, S.C.
Shin, Y.C.
Feng, Z.C.
Kuan, C.H.
Zhao, J.H.
Lu, W.J.
CHIEH-HSIUNG KUAN
Type
book