Effect of Substrate Temperature on Microstructure and Magnetic Properties of Single-Layered FePt Films
Resource
IEEE Transactions on Magnetics, 47(3), 524-527
Journal
IEEE Transactions on Magnetics
Pages
524-527
Date Issued
2011
Date
2011
Author(s)
Chen, S.C.
Sun, T.H.
Chang, C.L.
Su, W.H.
Shen, C.L.
Chen, J.R.
Abstract
The single-layered Fe 5.4 Pt 4.6 films with thickness of 30 nm are deposited directly on Si substrate at substrate temperatures (Ts) of 370 to 620°C. The single-layered FePt films incline to random orientation as the Ts is lower than 570°C. Upon increasing the substrate temperature to above 600°C, the peak intensity of (001) FePt is much higher than that of (111) FePt and the perpendicular squareness (S ⊥ ) is also much larger than that of in-plane squareness (S // ), indicating that the magnetic anisotropy of FePt film is changed from in-plane to out-of-plane. This finding reveals that a high perpendicular magnetic anisotropy of the FePt film can be obtained as the film is deposited at a higher substrate temperature of 620°C. Its perpendicular coercivity (Hc ⊥ ), perpendicular squareness and magnetization at 20 kOe are as high as 14.0 kOe, 0.96 and 473 emu/cm 3 , respectively.
Type
journal article
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