Design of dual-axis accelerometer with CMOS-MEMS
Journal
International Conference on Applications of Electromagnetism and Student Innovation Competition Awards
Date Issued
2010-08
Author(s)
Abstract
A dual-axis accelerometer with chopper-stabilized circuit is designed and implemented using the TSMC 0.18μm 1P6M CMOS process. The acceleration of a proof mass is detected by measuring the capacitance change of the capacitor bank linked to mass via springs. ©2010 IEEE.
SDGs
Type
conference paper