Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure

Journal

Microelectronic Engineering

Journal Volume

83

Journal Issue

4-9 SPEC. ISS.

Pages

893-896

Date Issued

2006

Author(s)

Chen, H.L.

Chuang, S.Y.

Cheng, H.C.

Lin, C.H.

Chu, T.C.

DOI

10.1016/j.mee.2006.01.095

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491351

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33646051989&doi=10.1016%2fj.mee.2006.01.095&partnerID=40&md5=5ca875051b1e319eaebf2e654fb41201

Type

journal article